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Peculiarities of the influence of nanostructuring of [SiO2< inf> Si3< inf>N4< inf>]n multilayer membranes on its thermal and mechanical properties


The effect of nanostructuring on the mechanical and thermal properties of [SiO2/Si3N4]n multilayer membranes, where n is the number of repetitions, was studied. It also was theoretically found that, when the membrane thickness is decreased, the mechanical deformation of the layers at a given pressure must take into account the transition from linear to nonlinear stress mechanism. This corresponds to the experimental results of testing the strength of round SiOn2n(600 nm)/Sin3nNn4n(130 nm)/SiO2 (400 nm)/SiaN4 (130 nm) multilayer membranes of different diameters of 1 mm, 1.4 mm, 1.8 mm respectively, within the measurement error. The good agreement between the numerical and analytical calculation of the equivalent heat capacity, thermal conductivity, and density of [SiOn2n/Sin3nNn4n]n multilayer membrane of different thickness and composition (for n = 8, 16, 28) is demonstrated. A decrease in the equivalent thermal conductivity of [SiOn2n/Sin3nNn4n]n membrane with increasing n is shown, which corresponds to the predominant heat propagation along the boundary of the layers. The results obtained can be used in the development of nanostructured [SiOn2n/Sin3nNn4n]nnnmultilayer membranes for various applications, such as Micro-Electro-Mechanical Systems (MEMS), bio-, gas-, pressure-sensors, X-ray sources and ultra-strong thin coatings.......

【作者名称】: Petr Yu. Glagolev, Andrey I. Ovodov, Gleb D. Demin, Nikolai A Djuzhev, Aleksei V. Nezhentsev
【作者单位】: Nanotechnology Center «Nano- and Microsystem Techniques», National Research University of Electronic Technology (MIET), Moscow, Russia, Nanotechnology Center «Nano- and Microsystem Techniques», National Research University of Electronic Technology (MIET), Moscow, Russia, Nanotechnology Center «Nano- and Microsystem Techniques», National Research University of Electronic Technology (MIET), Moscow, Russia, Nanotechnology Center «Nano- and Microsystem Techniques», National Research University of Electronic Technology (MIET), Moscow, Russia, Department of Quantum Physics and Nanoelectronics, National Research University of Electronic Technology (MIET), Moscow, Russia
【关 键 词】: Thermal conductivity, Conductivity, Biomembranes, Nonhomogeneous media, Silicon, Heating systems
【会议名称】: Proceedings of the 2018 IEEE Conference of Russian Young Researchers in Electrical and Electronic Engineering
【期刊论文数据库】: [DBS_Articles_01]
【期刊论文编号】: 101,777,888
【摘要长度】: 2,662
【会议地点】: St. Petersburg(RU);Moscow(RU)
【会议组织】: Nanotechnology Center «Nano- and Microsystem Techniques», National Research University of Electronic Technology (MIET), Moscow, Russia;Nanotechnology Center «Nano- and Microsystem Techniques», National Research University of Electronic Technology (MIET), Moscow, Russia;Nanotechnology Center «Nano- and Microsystem Techniques», National Research University of Electronic Technology (MIET), Moscow, Russia;Nanotechnology Center «Nano- and Microsystem Techniques», National Research University of Electronic Technology (MIET), Moscow, Russia;Department of Quantum Physics and Nanoelectronics, National Research University of Electronic Technology (MIET), Moscow, Russia;
【会议时间】: 2018
【上篇论文】: 外文会议 - Design and manufacturing of the all-composite visual display supportstructure of the SIMONA research simulator
【下篇论文】: 外文会议 - Mathematical Model of Process of Vibration Movement of Flexible Particle for Providing the Non-Destructive Testing of Serviceability of Vibrotechnics

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